Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum

Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum

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Bibliographic Details
Date:2018
Main Authors: Yu. D. Filatov, V. I. Sydorko, S. V. Kovalov, V. A. Kovalov, Ya. Yurchyshyn, M. A. Danylchenko, A. H. Vietrov
Format: Article
Language:English
Published: 2018
Series:Tooling materials science
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001084537
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-34258
record_format dspace
spelling open-sciencenbuvgovua-342582024-02-27T22:15:43Z Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum Yu. D. Filatov V. I. Sydorko S. V. Kovalov V. A. Kovalov Ya. Yurchyshyn M. A. Danylchenko A. H. Vietrov 2223-3938 2018 en Tooling materials science http://jnas.nbuv.gov.ua/article/UJRN-0001084537 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Tooling materials science
spellingShingle Tooling materials science
Yu. D. Filatov
V. I. Sydorko
S. V. Kovalov
V. A. Kovalov
Ya. Yurchyshyn
M. A. Danylchenko
A. H. Vietrov
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
format Article
author Yu. D. Filatov
V. I. Sydorko
S. V. Kovalov
V. A. Kovalov
Ya. Yurchyshyn
M. A. Danylchenko
A. H. Vietrov
author_facet Yu. D. Filatov
V. I. Sydorko
S. V. Kovalov
V. A. Kovalov
Ya. Yurchyshyn
M. A. Danylchenko
A. H. Vietrov
author_sort Yu. D. Filatov
title Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_short Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_full Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_fullStr Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_full_unstemmed Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_sort study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
publishDate 2018
url http://jnas.nbuv.gov.ua/article/UJRN-0001084537
work_keys_str_mv AT yudfilatov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT visydorko studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT svkovalov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT vakovalov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT yayurchyshyn studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT madanylchenko studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT ahvietrov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
first_indexed 2025-07-17T17:27:30Z
last_indexed 2025-07-17T17:27:30Z
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