Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
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| Datum: | 2018 |
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| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2018
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| Schriftenreihe: | Tooling materials science |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001084537 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-342582024-02-27T22:15:43Z Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum Yu. D. Filatov V. I. Sydorko S. V. Kovalov V. A. Kovalov Ya. Yurchyshyn M. A. Danylchenko A. H. Vietrov 2223-3938 2018 en Tooling materials science http://jnas.nbuv.gov.ua/article/UJRN-0001084537 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Tooling materials science |
| spellingShingle |
Tooling materials science Yu. D. Filatov V. I. Sydorko S. V. Kovalov V. A. Kovalov Ya. Yurchyshyn M. A. Danylchenko A. H. Vietrov Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| format |
Article |
| author |
Yu. D. Filatov V. I. Sydorko S. V. Kovalov V. A. Kovalov Ya. Yurchyshyn M. A. Danylchenko A. H. Vietrov |
| author_facet |
Yu. D. Filatov V. I. Sydorko S. V. Kovalov V. A. Kovalov Ya. Yurchyshyn M. A. Danylchenko A. H. Vietrov |
| author_sort |
Yu. D. Filatov |
| title |
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| title_short |
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| title_full |
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| title_fullStr |
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| title_full_unstemmed |
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| title_sort |
study of the state of the working surface of the tool at polishing the substrate from nitride aluminum |
| publishDate |
2018 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001084537 |
| work_keys_str_mv |
AT yudfilatov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum AT visydorko studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum AT svkovalov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum AT vakovalov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum AT yayurchyshyn studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum AT madanylchenko studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum AT ahvietrov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum |
| first_indexed |
2025-07-17T17:27:30Z |
| last_indexed |
2025-07-17T17:27:30Z |
| _version_ |
1837916426685382656 |